Abstract
Requirement of image recovery in IC detection is rising. IC noise image recovery technology based on three-dimensional energy optimization modeling and surface fairing is investigated. By spatial vector’s deduction of image’s noise point, modeling and fairing of IC image noise’s surface from three-dimensional information is achieved. Through surface extraction and fairing that smooth image plane can be obtained. Thus image recovery process is finished. Experiment and comparison prove that clear and stable IC recovery image can be gotten.