Abstract
MEMS fabrication process is an inherently rugged technology and has great potential to bring forth novel solutions on the harsh environment and critical applications. This paper reports on a very high performance closed-loop MEMS accelerometer targeted at inertial navigation applications. Motivation of this paper is to develop a high resolution inertial grade closed loop Accelerometer using the MEMS sensor fabricated at LEOS. The MEMS sensor with comb type structure has a sensitivity of 6 pF / g. This paper reports on the design and detailed simulation of signal conditioning circuit for MEMS accelerometer using a 6th order Sigma-Delta IC ADS-1278 provided by Texas Instruments. The functionality and the performance of the system were studied by P-Spice simulation. Signal-to-noise ratio (SNR) of 97.8dB and effective number of bits (ENOB) of 16 bits over a measurement range of +/-1g was estimated with an over sampling ratio (OSR) of 128.