Abstract
In recent years, with the rapid development of China's aerospace, automobile industry, robot application and other industries, 6D force sensor with its unique advantages, widely used in these fields. However, due to the high precision and difficult research, the 6D force sensor is subj ect to many constraints in the design and calibration. This paper first introduces the characteristics and application fields of 6D force sensor, but there is not a static calibration platform for 6D micro force / moment sensor. In order to meet the static calibration requirements of 6D micro force / torque sensor, a 6D micro force / torque sensor is designed and a prototype is made and the structural design is given.