Calculation of partial capacitances using a modified iterative complex image method

S. Rehfuss; C. Gorecki; D. Peters; R. Laur

doi:10.1109/DTIP.2003.1287014

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Design, Test, Integration and Packaging of MEMS/MOEMS, Symposium on

Calculation of partial capacitances using a modified iterative complex image method

Year: 2003, Pages: 90-94

DOI Bookmark: 10.1109/DTIP.2003.1287014

Authors

S. Rehfuss, Inst. for Electromagn. Theor. & Microelectron., Bremen Univ., Germany
C. Gorecki, Inst. for Electromagn. Theor. & Microelectron., Bremen Univ., Germany
D. Peters, Inst. for Electromagn. Theor. & Microelectron., Bremen Univ., Germany
R. Laur, Inst. for Electromagn. Theor. & Microelectron., Bremen Univ., Germany

Calculation of partial capacitances using a modified iterative complex image method

Authors

Abstract