Dielectric miceocavity resonators based on silicon mold

Yigui Li; Di Chen; Jun Zhu; Jingquan Liu; Jiliang Zhang

doi:10.1109/DTIP.2003.1287048

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Design, Test, Integration and Packaging of MEMS/MOEMS, Symposium on

Dielectric miceocavity resonators based on silicon mold

Year: 2003, Pages: 261-264

DOI Bookmark: 10.1109/DTIP.2003.1287048

Authors

Yigui Li, Key Lab. for Thin Film & Microfabrication of Minist. of Educ., Shanghai Jiao Tong Univ., China
Di Chen, Key Lab. for Thin Film & Microfabrication of Minist. of Educ., Shanghai Jiao Tong Univ., China
Jun Zhu, Key Lab. for Thin Film & Microfabrication of Minist. of Educ., Shanghai Jiao Tong Univ., China
Jingquan Liu, Key Lab. for Thin Film & Microfabrication of Minist. of Educ., Shanghai Jiao Tong Univ., China
Jiliang Zhang, Key Lab. for Thin Film & Microfabrication of Minist. of Educ., Shanghai Jiao Tong Univ., China

Dielectric miceocavity resonators based on silicon mold

Authors

Abstract