Abstract
The study of inelastic scattering of electrons in a surface region is important to the Comprehensive understanding of the basic process of electron-surface interaction in an electron microscopy and surface electron spectroscopy. Recently, an interest has been grown up on the study of the surface energy loss features presented in an Auger electron spectroscopy-, X-ray photoelectron spectroscopy-, and reflection electron energy loss spectroscopy-spectrum. The relevant differential cross-section for electron-surface inelastic scattering can be obtained from the electron self-energy inhomogeneous in the distance from the surface. This self-energy has been formulated in terms of a wave-vector dependent dielectric function, which is obtained with optical data. In this paper, we present our calculation model and report the numerical computation results performed with a parallel computer. Dawn-1000, on the electron-surface inelastic scattering cross-section. With this cross-section, we have carried out a Monte Carlo simulation of electron trajectories penetrating an Au-surface. The Simulated REELS-spectra have been compared with an experimental measurement to confirm the usefulness of the present scattering model.