Transition of MEMS Technology to Nanofabrication

Stephen C. Jakeway; H. John Crabtree; Teodor Veres; Neil S. Cameron; Helge Luesebrink; Thomas Glinsner

doi:10.1109/ICMENS.2003.1221977

MEMS, NANO, and Smart Systems, International Conference on

Transition of MEMS Technology to Nanofabrication

Year: 2003, Pages: 118

DOI Bookmark: 10.1109/ICMENS.2003.1221977

Authors

Stephen C. Jakeway, Micralyne, Inc.
H. John Crabtree, Micralyne, Inc.
Teodor Veres, IMI-CNRC
Neil S. Cameron, IMI-CNRC
Helge Luesebrink, EV Group, Inc.
Thomas Glinsner, EV Group, Inc.

Abstract

The transition of MEMS technology to nano fabrication is a solution to the growing demand for smaller and high-density feature sizes in the nanometer scale. Techniques for fabricating ?m-, and nm-features will be discussed, and results achieved with nanoimprinting technologies will be presented.

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Transition of MEMS Technology to Nanofabrication

Authors

Abstract

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