Abstract
One of the best know examples of integration of spintronic devices with CMOS is given by MRAM (magnetic random access memory), a digital memory where each node in its simplest form includes a switching element (transistor) in series with a magnetic tunnel junction (magnetic storage element). In the analog field, work is beginning in the design, fabrication, and back end integration of ASICS with magnetic sensors. This talk describes circuit design, integration process, fabrication and test of two different types of microsystems: a multiplexed protein/DNA biochip where an array of linear sensors (up to 256) fabricated on top of a 0.35um CMOS circuit detect in real time protein/DNA hibridization to immobilized probes. System noise (ASIC, sensor, fluidic environment) defines analyte minimum detectivity. A second example covers the design and fabrication of a non destructive testing platform, from the ASIC controlling sensor array readout, to the sensor array itself, consisting on an array of spin valve or magnetic tunnel junction elements. Depending on defect nature (buried or surface), signals need to be detected either at few hundred Hz, or at MHz level. System noise (ASIC and sensor noise) defines (for perfectly homogeneous samples) defect detection capability.