International Conference on Nano/Micro Engineered and Molecular Systems
Micro solid state silicon plate wind velocity sensor
DOI Bookmark: 10.1109/NEMS.2009.5068513
Authors
Lidong Du, State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, ChinaZhan Zhao, State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
Cheng Pang, State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
Zhen Fang, State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
Yonghong Liu, State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
Youjun Han, Institute of Meteorology, PLA University of Science&Technology, Nanjing 211101, China