Abstract
The medical applications of MEMS (Micro-Electro-Mechanical-Systems) microsensors have been introduced. MEMS based sensors such as pressure sensors, accelerometers, Glucose sensors, chemical gas sensors and etc. and its advantages with respect to the other sensors in medical applications are explained. Small size, low price, high functionality, high precision, fast response time and so on are some of MEMS sensors benefits. Also, some special applications of these sensors such as blood pressure measurement, pacemaker acceleration measurement, blood glucose measurement and etc. are evaluated.